The three-stage scroll vacuum pump from Air Squared Inc., Broomfield, Colo. (www.airsquared.com), can produce vacuums up to 5 mTorr (6.5 × 10-6 atm) without a turbopump. That’s about 10 times the ...
Edwards new nXRi high performance compact dry pump is the perfect vacuum solution across a spectrum of applications due to its compact size and low power, reliable performance and reduced costs.